Vacuum installation of VTT-700-REZ.

Vacuum installation of VTT-700-REZ is intended for a dusting in vacuum by a magnetron mode unilateral resistive (PC3710, PC5406) and metal (Cr, Ta, etc.) thin-film layers on substrates of 60х48х1 in size * and 60х48х0,5 * to mm with the subsequent annealing.

Technical characteristics.

 1 . Inside dimension of a chamber: Ø650 x 560 mm.

2 . limit residual vacuum of 5х10-4 Pas in a chamber.

3 . Capacity consumed by installation:

- in a pumping mode - to 12 kW;

- in a dusting mode – to 40 kW (depending on quantity of at the same time used sources)

Installation structure

Name

Quantity

1.

Magnetron source with the power unit.
Size of a target, mm
Power unit
- category current, move, A

4 pcs

440x80x8 mm

10

2.

Ionic source

- working zone, mm

- category current, A

- working tension, V

1

450

0.7

3000

3.

Industrial equipment


-50 pcs size 60х48х0,5 mm or 60х48х1 mm

2 package

4.

Forvacuum WU232 unit

1

5.

High-vacuum otkachny the module on the basis of the diffusive pump ND-400

1

6.

Lock high-vacuum Du 400

1

7.

Heaters intra chamber steering with the temperature of substrate with opportunity up to 400 ˚ Page.

1

8.

Vacuum sensors:

-         PFEIFFER  IKR 251

-         PFEIFFER  PKR 251

-         PFEIFFER  TPR 280

 

1

1

2

9.

System pneumatic on the basis of elements SMC

1

10.

System hydraulic on the basis of elements SMC

1

11.

System automatic supply of technological gases with possibility of work at the same time with 4 gases

1

12.

Control system on the basis of the industrial controler of the German corporation WAGO Kontakttehnik GmbH.

Touch control panel (Touch screen interface)

Steering manual and automatic.

Remote access

Full automation of process of drawing coverings.

Full automation of process of drawing coverings.

 
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