Vacuum installation of VTT-700-REZ.
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Vacuum installation of VTT-700-REZ is intended for a dusting in vacuum by a magnetron mode unilateral resistive (PC3710, PC5406) and metal (Cr, Ta, etc.) thin-film layers on substrates of 60х48х1 in size * and 60х48х0,5 * to mm with the subsequent annealing.
Technical characteristics.
1 . Inside dimension of a chamber: Ø650 x 560 mm.
2 . limit residual vacuum of 5х10-4 Pas in a chamber.
3 . Capacity consumed by installation:
- in a pumping mode - to 12 kW;
- in a dusting mode – to 40 kW (depending on quantity of at the same time used sources)
Installation structure
|
№ |
Name |
Quantity |
|
1. |
Magnetron source with the power unit. |
4 pcs 440x80x8 mm 10 |
|
2. |
Ionic source |
1 450 0.7 3000 |
|
3. |
Industrial equipment
|
2 package |
|
4. |
Forvacuum WU232 unit |
1 |
|
5. |
High-vacuum otkachny the module on the basis of the diffusive pump ND-400 |
1 |
|
6. |
Lock high-vacuum Du 400 |
1 |
|
7. |
Heaters intra chamber steering with the temperature of substrate with opportunity up to 400 ˚ Page. |
1 |
|
8. |
Vacuum sensors: - PFEIFFER IKR 251 - PFEIFFER PKR 251 - PFEIFFER TPR 280 |
1 1 2 |
|
9. |
System pneumatic on the basis of elements SMC |
1 |
|
10. |
System hydraulic on the basis of elements SMC |
1 |
|
11. |
System automatic supply of technological gases with possibility of work at the same time with 4 gases |
1 |
|
12. |
Control system on the basis of the industrial controler of the German corporation WAGO Kontakttehnik GmbH. Full automation of process of drawing coverings. |