VACUUM INSTALLATION VTT-700 "O" FOR DRAWING OF OPTICAL COVERINGS.
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Vacuum installation is intended for drawing in vacuum of coverings by a method electron beam, magnetronic and resistive evaporation of the various materials with preliminary ionic clearing on the basis of cryogenic pumping out.
In particulars now installation is used for drawing of layers АuGe-Аu and
Ni-Аl On a substrate from GaAs. Высоковакуумная откачная system on the basis of the cryogenic
The pump.
Management откачной system, system pneumatic, system hydraulic -
On the basis of the industrial logic controler of German manufacture,
Providing high reliability, flexible change of algorithms of management
And replacement of control facilities. A workplace of the operator, installation of parameters and
Modes of technological devices, management of evaporators of power units,
Blousing of gases, system of quartz control - on the basis of personal
The computer under Windows 2000/XP. Software SCADA - systems in the environment of Visual With ++.
TECHNICAL CHARACTERISTICS.
Chamber height 600мм;
Diameter of the chamber 640мм;
Frequency of rotation of industrial equipment 0... 20 rpm
Industrial equipment loading (for plates 50 GaAs) 48 pcs;
The maximum temperature of heating of substrates 350С;
The capacity consumed by installation, no more 25 kw.
Limiting residual vacuum 5*10-4 Pases.
INSTALLATION STRUCTURE.
| № |
Name |
Quantity |
| 1. |
The highvacuum pump module on base |
1 |
| 2. |
Forvacuum unit NVR 25D/ND 200 |
1 |
| 3. |
Highvacuum shutter of Du 250 |
1 |
| 4. |
The chamber vacuum with a door |
1 |
| 5. |
Heaters intrachamber |
2 |
| 6. |
Industrial equipment with the replaceable |
1 |
| 7. |
The Electron beam evaporator |
1 |
| 8. |
The resistive evaporator |
1(2) |
| 9. | Ionic source of etching |
1 |
| 10. |
The magnetronic evaporator |
4 |
| 11. |
System hydraulic (SMC) |
1 |
| 12. |
System pneumatic (SМС) |
1 |
| 13. | System of quartz control of a thickness Coverings with three gages |
1 |
| 14. |
Management rack |
1 |
| 15. |
Rack of food УЭЛИ |
1 |
| 16. |
Rack of a food of magnetrons, source |
1 |