Vacuum installation VTT-PLASMA.
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Vacuum installation for drawing of protective and protectively-decorative coverings by refractory electrospent materials: the titan, chrome, zirconium, molybdenum, the titan, aluminium, and also their connections with gases (TiN, TiC, ZrN, AlN-TiN-AlN etc.) vacuum-plasma way on substrates from metal of ceramics, glass, plastic, etc.
On installation following technological processes are realised:
- Preliminary heating and обезгаживание surfaces of a product heaters and electronic heating;
- Ionic clearing, etching of a surface of products;
- Deep плазмохимическая processing of a surface of products;
- Drawing by an electroarc method of single-layered and multilayered coverings on the basis of pure metals or their connections: nitrides, carbides, carbonitrides.
Technical characteristics.
Chamber height 600mm.
Working diameter of industrial equipment 500mm.
Limiting residual pressure in the chamber 8х10-4 the Pas.
Installation structure.
|
Name |
Quantity |
|
Highvacuum exhaust system on base диффузионного pump NVDM-400/7000 |
1 |
|
Lowvacuum exhaust system on base unit AVZ 20/ND 200 |
1 |
|
Arc evaporators with cathode Ø of 63 mm |
2 |
|
Ionic source of clearing from the worker to 400 mm |
1 |
|
Heaters intrachamber |
1 |
|
Drive of rotation of industrial equipment |
1 |
|
Industrial equipment (it is made under напыляемые products in coordination with the customer) |
1 |
|
The high-voltage block of displacement on industrial equipment |
1 |
|
IR the Pyrometer for the control of temperature of a product |
1 |
|
System газонапуска with automatic maintenance of pressure, quantity of channels not less than 3 |
1 |
Management of installation probably in two variants:
- Semi-automatic (automatic откачка chambers);
- The automatic.