VACUUM INSTALLATION FOR DRAWING OPTICAL COVERINGS VTT-OPTIC-ELI-2-IS1.
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Vacuum installation of new generation on the basis of cryogenic pumping of VTT-OPTIC-ELI-2-IS1 is intended for drawing in vacuum of optical multilayered thin-film coverings by an electron beam and resistive mode with preliminary cleaning of a surface of substrates by an ion bunch, and also with possibility of ion assistance and heating of substrates.
Installation has to provide uniform (with a neravnotolshchinnost on all work face of a dome for more than 2%) drawing coverings with a total thickness not less than 15 microns on one side face of a conditional plate.
TECHNICAL CHARACTERISTICS.
1 . Inside dimension of a chamber: H=1000 mm, D=1100 mm.
2 . Limit residual vacuum of 5х10-4 Pas in a chamber.
3 . The capacity consumed by installation:
- in a pumping mode - 12 kW;
- in a mode of cleaning and drawing a covering - to 40 kW. (depending on quantity of at the same time used sources)
INSTALLATION STRUCTURE.
|
№ |
Name |
Quantity |
|
1. |
The electron beam EVM-8 (FerroTec) evaporator with Carrera 6 power units.
|
2 2 1 1 |
|
2. |
Ion source of cleaning and assistance |
1 |
|
3. |
Industrial equipment of planetary type. Industrial equipment spherical. |
1 6 package |
|
4. |
Forvacuum Okta 500 /HENA 300 (PFEIFFER) unit |
1 |
|
5. |
High-vacuum otkachny the module on the basis of the cryogenic pump Cryo Torr 20HP. |
1 |
|
6. |
Lock high-vacuum Du 500 air-controlled and possibility of throttling of pumping |
1 |
|
7. |
Heaters intra chamber steering with the temperature of substrate with opportunity up to 400 ˚ Page. |
Two zones on 6 kW |
|
8. |
Vacuum sensors: - PFEIFFER IKR 251 - PFEIFFER PKR 251 - PFEIFFER TPR 280 |
1 1 2 |
|
9. |
System pneumatic on the basis of elements SMC |
1 |
|
10. |
System hydraulic on the basis of elements SMC |
1 |
|
11. |
System automatic supply of technological gases with possibility of work at the same time with 2 gases |
1 |
|
12. |
Control system on the basis of the industrial controler of the German corporation WAGO Kontakttehnik GmbH. Touch control panel (Touch screen interface) Steering manual and automatic. Remote access Full automation of process of drawing coverings. |
1 |