VACUUM LINE VTT-PLASMA-M2-IS1.
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Vacuum line VTT-PLASMA-M2-IS1 It is intended for drawing in vacuum of thin-film coverings Cr on substrates from glass магнетронным in the way with preliminary clearing by an ionic source and heating.
Installation provides uniform drawing of coverings by thickness not less than 0.1 µm on one lateral surface of a conditional plate, the size 127 mm on 127 mm in number of not less 400 шт for one loading.
The maximum size напыляемого products - of 3650*400 mm.
TECHNICAL CHARACTERISTICS.
1. The internal size of the chamber: Н=460 mm, В=160мм, L = 8200 mm
2. Limiting residual vacuum 8х10-4 the Pas in the chamber.
3. The capacity consumed by installation:
- In a pumping out mode - 12 kW;
- In a mode of clearing and covering drawing - to 40 kW. (Depending on quantity of simultaneously used sources)
INSTALLATION STRUCTURE.
|
№ |
Name |
Quantity |
|
1. |
Magnetronic source with the power unit. The size of a target, mm The power unit Category current, A |
2 pcs 570*80*10 2 pcs 25 |
|
2. |
Ionic source - A working zone, mm - A category current, A - Working volyage, In |
1
500*70 0.7
3000 |
|
3. |
Industrial equipment of extended type. Quantity of simultaneously loaded products in the size 400*400 – 400 |
1 compl. 400 pcs |
|
4. |
The forvacuum unit Okta 500 /HENA 300 (PFEIFFER) |
1 |
|
5. |
Highvacuum pumping out the module on the basis of diffusive pump NVDM-400 |
1 |
|
6. |
Highvacuum shutter Du 400 air-controlled and possibility дросселирования pumpings out |
1 |
|
7. |
Heaters intrachamber with possibility of management in temperature of a substrate to 400 ˚C |
Two zones on 8 kw |
|
8. |
Vacuum gages: - PFEIFFER IKR 251 - PFEIFFER PKR 251 - PFEIFFER TPR 280 |
1 1 2 |
|
8 |
System pneumatic on the basis of elements SMC |
1 |
|
9 |
System hydraulic on the basis of elements SMC |
1 |
|
10 |
System automatic givings of technological gases with work possibility simultaneously with 4 gases |
1 |
|
11 |
Control system on the basis of the industrial controler of German corporation WAGO Kontakttehnik GmbH. Touch screen interface Management manual and automatic. Remote access All-around automation of process of drawing of coverings. |
1 |