Vacuum installation V-700 "U".
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Vacuum installation is intended for drawing in vacuum thin-film wearproof, decorative, sheetings on the tool, a product from ceramics, plastic etc. by a method electroarc and magnetron a dusting with preliminary clearing by an ionic source.
Management exhaust system, system pneumatic, system hydraulic - on the basis of the industrial logic controller of the German manufacture providing high reliability, flexible change of algorithms of management and replacement of control facilities. A workplace of the operator, installation of parametres and modes of technological devices, management of power units of evaporators, напуска gases, system of the quartz control - on the basis of the personal computer under Windows 2000/XP. Software SCADA - systems in the environment of Visual C++.
Technical characteristics.
Diameter of the chamber 700mm;
Chamber height 776mm;
Number of turns of the central wheel
Industrial equipment 0... 20 rpm;
The maximum temperature of heating of substrates 400Сº;
The capacity consumed by installation, no more 70 kw;
Limiting residual vacuum 8*10-4 Pases
Installation structure.
|
Name |
Quantity |
|
Higvacuum exhaust the module on the basis of pump NVDM-400/7000 |
1 |
|
The forvacuum unit on the basis of pumps of German firm PFEIFFER WKP 250A/DUO 120 |
1 |
|
Highvacuum shutter of Du 400 |
1 |
|
The chamber vacuum with a door |
1 |
|
Heaters intrachamber |
2 |
|
Industrial equipment on 48 positions |
1 |
|
The electroarc evaporator |
6 |
|
Ионный источник очистки и ассистирования |
1 |
|
Unbalanced magnetron |
2 |
|
High/basic |
1 |
| Management rack: - The vacuum gauge of firm PFEIFFER TPG 256 A. Maxi Gauge; - A monitor the expense of gases with optical and gauges of the control of plasma, МПУ-2.32.1 |
1 |
|
Power rack with power units магнетронов, an ionic source, high/basic |
1 |
|
Power rack with power units of arc evaporators |
2 |