Vacuum installation VTT-KASKAD-DUO.

Vacuum installation VTT-KASKAD-DUO is intended for drawing of strengthening, protectively-decorative coverings by a method magnetron and electro-arc dispersion from electrowire refractory materials (Ti, Mo, Zr, etc.).


Distinctive feature of the given vacuum installation:

- Presence of two doors that allows to accelerate and facilitate essentially loading напыляемых products;

- exhaust the branch pipe is executed on all height of the chamber;

- Possibility of installation of technological sources in different positions.

Technical characteristics.

1. Internal diameter of chamber D=850 of mm.

2. Height of chamber N=1300 of mm.

3. Limiting residual vacuum 2х10-3 the Pas.

4. The capacity consumed by installation:

- In a mode exhaust 11 kw;

- In a mode of drawing of coverings from 40 to 65 kw (depending on applied sources)

Installation structure.

Name

Quantity

1

The magnetron evaporator with a working zone to 1100 mm with power supplies

4

2

Installation of arc planar evaporators with circulation of an arch with a working zone to 1200 mm is possible

4

3

Ionic source of clearing and ассистирования

1

4

Power unit basic/high

1

5

Industrial equipment (the industrial equipment in coordination with the customer is possible)

1

6

Heaters intrachamber with possibility of management in temperature of a substrate to 600˚ С

4

7

The forvacuum unit 2 АВЗ 20/НД 500 (the complete set pumps of German firm PFEIFFER is possible)

1

8

Highvacuum exhaust the module on base диффузионного pump ND 400

1

9

Затвор высоковакуумный с пневматическим управлением и возможностью дросселирования откачки

1

10

System pneumatic on the basis of elements SMC.

1

11

System hydraulic on the basis of elements SMC.

1

12

Control system on the basis of industrial controller Siemens

1

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