Vacuum installation VTT-KASKAD-DUO.
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Vacuum installation VTT-KASKAD-DUO is intended for drawing of strengthening, protectively-decorative coverings by a method magnetron and electro-arc dispersion from electrowire refractory materials (Ti, Mo, Zr, etc.).
Distinctive feature of the given vacuum installation:
- Presence of two doors that allows to accelerate and facilitate essentially loading напыляемых products;
- exhaust the branch pipe is executed on all height of the chamber;
- Possibility of installation of technological sources in different positions.
Technical characteristics.
1. Internal diameter of chamber D=850 of mm.
2. Height of chamber N=1300 of mm.
3. Limiting residual vacuum 2х10-3 the Pas.
4. The capacity consumed by installation:
- In a mode exhaust 11 kw;
- In a mode of drawing of coverings from 40 to 65 kw (depending on applied sources)
Installation structure.
|
№ |
Name |
Quantity |
|
1 |
The magnetron evaporator with a working zone to 1100 mm with power supplies |
4 |
|
2 |
Installation of arc planar evaporators with circulation of an arch with a working zone to 1200 mm is possible |
4 |
|
3 |
Ionic source of clearing and ассистирования |
1 |
|
4 |
Power unit basic/high |
1 |
|
5 |
Industrial equipment (the industrial equipment in coordination with the customer is possible) |
1 |
|
6 |
Heaters intrachamber with possibility of management in temperature of a substrate to 600˚ С |
4 |
|
7 |
The forvacuum unit 2 АВЗ 20/НД 500 (the complete set pumps of German firm PFEIFFER is possible) |
1 |
|
8 |
Highvacuum exhaust the module on base диффузионного pump ND 400 |
1 |
|
9 |
Затвор высоковакуумный с пневматическим управлением и возможностью дросселирования откачки |
1 |
|
10 |
System pneumatic on the basis of elements SMC. |
1 |
|
11 |
System hydraulic on the basis of elements SMC. |
1 |
|
12 |
Control system on the basis of industrial controller Siemens |
1 |