VACUUM INSTALLATION VTT-PLASMA-М3-IS1 FOR DRAWING OF COVERINGS ON ELEMENTS OF SOLAR BATTERIES.
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Vacuum installation VTT-PLASMA-M3-IS1 for drawing in vacuum of thin-film coverings Al on substrates from Si magnetronic in the way with preliminary clearing by an ionic source.
Installation provides uniform drawing of coverings on one lateral surface of a plate, the size 125mm on 125 mm, a thickness of a plate 220±20µm, at simultaneous loading of 300 products.
Vacuum installation should be maintained on industrial sites and in laboratories at temperature of air from 17 to 25ºС, relative humidity of air from 40 to 75 % and atmospheric pressure 84,0*10 ³ - 106,0*10³Pа.
Use of installation for drawing of decorative coverings on products from various materials is possible.
TECHNICAL CHARACTERISTICS.
1. The internal size of the chamber: D=1060 mm, H=2370.
2. Limiting residual vacuum 9х10-4 the Pas in the chamber.
3. The capacity consumed by installation:
- In a pumping out mode - 12 kw;
- In a mode of clearing and covering drawing - to 60 kw. (Depending on quantity of simultaneously used sources)
INSTALLATION STRUCTURE.
|
№ |
Name |
Quantity |
|
1. |
Magnetronic source with the power unit. The size of a target, mm The power unit Categories, a move, A |
3 pcs. 2230x100x10 3pcs. 40 |
|
2. |
Magnetronic source with the power unit. The size of a target, mm The power unit Categories, a move, A |
1 2100x70 0.7 3000 |
|
3. |
Industrial equipment of drum-type type. Quantity of simultaneously loaded products in the size of 125*125 mm (the industrial equipment variant directly under products of the customer is possible) |
2 sets.
300 pcs. |
|
4. |
The forvacuum unit Okta 500 /HENA 300 (PFEIFFER) |
1 |
|
5. |
Highvacuum the pump module on the basis of diffusive pump NVDM-400 |
1 |
| 6. |
Shutter highvacuum Du 400 air-controlled and possibility throthle pumpings out |
1 |
|
7. |
Heaters intrachamber with possibility of management in temperature of a substrate to 400 ˚ C |
4 |
|
8. |
Vacuum gages: - PFEIFFER IKR 251 - PFEIFFER PKR 251 - PFEIFFER TPR 280 |
1 1 2 |
|
8. |
Control of a thickness of coverings: - The quartz controler of a thickness. - Resistance control on the sample. |
1 1 |
|
8 |
System pneumaticc on the basis of elements SMC |
1 |
|
9 |
System hydraulic on the basis of elements SMC |
1 |
|
10 |
System automatic givings of technological gases with work possibility simultaneously with 4-8 gases |
1 |
|
11 |
Control system on the basis of the industrial controler of German corporation WAGO Kontakttehnik GmbH. The touch control panel (Touch screen interface) Management manual and automatic. Remote access All-around automation of process of drawing of coverings. |
|