BPIS

Inverter Substrate Bias Power Supply A professional solution for precise bias potential control in vacuum sputtering systems. The Inverter Substrate Bias Power Supply (IBPS) is a high-tech voltage regulator designed to provide negative potential on substrates (carousels) with an isolated rotary input. It is capable of cleaning parts and coating complex-shaped parts. The use of modern inverter technology based on IGBT modules guarantees high process stability and equipment protection against arc discharges. Key Benefits

• Intelligent Arc Protection: If the current exceeds 20 A, the unit instantly reduces the voltage, effectively quenching the arc and preventing defective parts or damage to the tooling.

• High Accuracy and Stability: Thanks to voltage feedback, output parameter instability does not exceed ±1%, which is critical for achieving repeatable sputtering results.

• Continuous Operation: Reliable components and a sophisticated filtration system allow the unit to operate in a continuous production cycle.

• Safe Startup: A built-in soft-charge system eliminates sudden current surges in the plant’s electrical system when the unit is turned on. Design and Control Features The unit is housed in a standard industrial enclosure for installation in a 19-inch rack. The control interface is intuitive and adapted for semi-automated operation:

• Clear Display: Digital ammeter and voltmeter on the front panel allow real-time monitoring of process parameters.

• Control System Integration: An “Interlock” connector is provided on the rear panel for communication with the vacuum system control system, enabling automation of deposition cycles.

• Safety System: LED indication of phases (A, B, C) and “Ready”/”Run” status minimizes the risk of operator error. Applications Ideal for applying hardening, wear-resistant coatings (PVD, magnetron sputtering).