VTT 1100 E2IR
The VTT 1100 E2IR system is designed for deposition of high-quality multilayer optical coatings for the visible, infrared and ultraviolet ranges.
The of this model can spray filters, anti-reflective coatings, mirror coatings, and coatings that increase the reflection coefficient.
Technical specifications.
| 01 | Chamber size, mm | Ø1100x1200 | 02 | Fore | Roots pump with a pumping speed of 500 m³/h Rotary vane pump with a pumping speed of 250 m³/h |
| 03 | High vacuum pump | Cryogenic pump DZB500 | 04 | Vacuum control | INFICON vacuum sensors |
| 05 | Rotational drive | Upper | 06 | Electron beam evaporators | ELI VTT-8 (2 pcs) |
| 07 | Ion source of cleaning and assistance | HCS 3000 | 08 | Quartz control system | A controller based on the SQC 310 with quartz sensors from INFICON |
| 09 | Photometric control system | Optical system for transmission and reflection monitoring, spectral range 380-1700 nm 8 witness positions |