VTT 1900 E2I2R6
VTT 1900 E2I2R6 installation for deposition of high-quality multilayer optical coatings for the visible range.
This vacuum system is designed for the deposition of large-size aspherical optics. The primary purpose of this equipment is to deposit mirror coatings with increased reflectivity in the visible spectrum.
Technical specifications.
| 01 | Chamber size, mm | Ø1900х2100 | 02 | High vacuum pump | DZB500 Cryogenic Pump (2 pcs) |
| 03 | Vacuum control | Vacuum sensors from INFICON | 04 | Rotational drive | Upper |
| 05 | Loading mechanism | Electric | 06 | Electron beam evaporators | ELI VTT-10 (2 pcs) |
| 07 | Resistive evaporator | 6 resistive evaporators | 08 | Ionic source for cleaning and assisting | HCS-3000 |
| 09 | Quartz control system | INFICON SQC 310 controller with two quartz sensors | 10 | Photometric control system | Optical system for transmission and reflection monitoring, spectral range 380–1100 nm8 witness positions |