VTT-ELI

An electron beam evaporator (EBEV) allows the evaporation of refractory oxides, semiconductor materials, and metals in a vacuum. Evaporation is achieved by heating the material with a high-energy electron beam emitted from the cathode surface. To ensure uniform wear of the evaporated material, the EBEV is equipped with a beam deflection system along the X and Y axes and can scan the evaporation area with a specified beam amplitude and frequency. The beam angle is 270°. The EBEV crucible is directly water-cooled and is sealed with a special crucible lid. Depending on needs, the EBEV can be equipped with the following removable crucibles: – single-position; – two-position; – three-position; – four-position; – six-position; – eight-position. VTT LLC manufactures two types of evaporators: VTT ELI6 with a maximum power of 6 kW and VTT ELI8 with a maximum power of 8 kW.