Magnetron evaporator

A distinctive feature of magnetron evaporators is the use of a special magnetic system that creates a closed-loop, tunnel-like magnetic field above the sputtering target. This creates the conditions for producing localized, high-density plasma. The main elements of the device are the target cathode, the anode, and the magnetic system. Magnetic field lines are connected between the poles of the magnets, forming a magnetic system. The target surface, located between the entry and exit points of the magnetic field lines, is intensively sputtered and takes the form of a closed path, the geometry of which is determined by the shape of the magnetic system poles.