VTT 1100 D2IM3
The VTT 1100 D2IM3 installation is designed for applying electrically conductive coatings (copper, silver, chrome, aluminum) to ceramic rods using the vacuum-plasma method.
The operates in automatic mode.
Technical specifications.
| 01 | Chamber size, mm | Ø1100х600 | 02 | Fore | Roots pump with a pumping speed of 500 m³/h Rotary vane pump with a pumping speed of 250 m³/h |
| 03 | High vacuum pump | Diffusion pump ND 500 | 04 | Vacuum control | INFICON vacuum sensors |
| 05 | Rotational drive | Lower | 06 | Magnetron sputtering source, target, mm | 100x400x10 |
| 07 | Point source of arc evaporation, cathode, mm | Ø78х35 |