VTT 1100 D6IM2
The VTT 1100 D6IM2 unit is designed for applying hardening coatings to refractory electrically conductive materials:
titanium, chromium, zirconium, molybdenum, aluminum, as well as their compounds with gases (TiN, TiC, ZrN, AlN-TiN-AlN, etc.) using the vacuum-plasma method on substrates made of metal, ceramics, and glass
Technical specifications.
| 01 | Chamber size, mm | Ø1100х1300 | 02 | Fore | Roots pump with a pumping speed of 560 m³/h Rotary vane pump with a pumping speed of 300 m³/h |
| 03 | High vacuum pump | Diffusion pump ND 630E | 04 | Vacuum control | INFICON vacuum sensors |
| 05 | Rotational drive | Upper | 06 | Magnetron sputtering source, target, mm | 100x1100x10 |
| 07 | Extended arc evaporation source, cathode, mm | 80x1080x25 | 08 | Ion cleaning source, ion beam opening, mm | 1025 |