VTT 1200 E2IR2
The VTT 1200 E2IR2 installation is designed for applying optical multilayer thin-film coatings using electron beam and resistive evaporation methods.
The installation is equipped with an ion source for cleaning the sprayed products and assisting the formed films.
Technical specifications.
| 01 | Chamber size, mm | Ø1200x1200 | 02 | Fore | Rotary vane pump, pumping speed 300 m³/h Roots pump, pumping speed 290 m³/h |
| 03 | High vacuum pump | Diffusion pump ND630 | 04 | Vacuum control | Vacuum sensors from INFICON |
| 05 | Rotational drive | Top rotation drive with the possibility of installing a dome or planetary equipment | 06 | Electron beam evaporators | ELI VTT-8 (2 pcs) |
| 07 | Ion source of cleaning and assistance | HCS-3000 | 08 | Quartz control system | INFICON SQC 310 controller with a sensor integrated into a common head with an optical control system |
| 09 | Photometric control system | Optical system for transmission and reflection monitoring, spectral range 380–1100 nm 8 witness positions |