VTT 700 D7IM2
The VTT 700 D7IM2 unit is designed for applying hardening coatings to refractory electrically conductive materials:
titanium, chromium, zirconium, molybdenum, aluminum, as well as their compounds with gases (TiN, TiC, ZrN, AlN-TiN-AlN, etc.) using vacuum-plasma method on substrates made of metal, ceramics, glass, plastic, etc. The operates in automatic mode.
Technical specifications.
| 01 | Chamber size, mm | Ø 700x760 | 02 | Fore | Roots pump with a pumping speed of 540 m³/h Rotary vane pump with a pumping speed of 90 m³/h |
| 03 | High vacuum pump | Diffusion pump ND 500 | 04 | Vacuum control | INFICON vacuum sensors |
| 05 | Rotational drive | Upper | 06 | Magnetron sputtering source, target, mm | 80x604x10 |
| 07 | Point source of arc evaporation, cathode, mm | Ø78х35 | 08 | Extended arc evaporation source, cathode, mm | 80x592x25 |
| 09 | Ion cleaning source, ion beam opening, mm | 465 |