VTT 700 I2M8
The VTT 700 I2M8 is designed for applying metallic conductive and adhesive layers (Cr, Ta, Cu) onto ceramic substrates measuring 60x48x1 mm and 60x48x0.5 mm.
Magnetron coating method with simultaneous coating of both sides. Fully automated coating process using quartz coating thickness sensors.
Technical specifications.
| 01 | Chamber size, mm | Ø650х720 | 02 | Fore | Roots pump with a pumping speed of 63 m³/h Rotary vane pump with a pumping speed of 3000 m³/h |
| 03 | High vacuum pump | Diffusion pump ND 400R | 04 | Vacuum control | INFICON vacuum sensors |
| 05 | Rotational drive | Upper | 06 | Magnetron sputtering source, target, mm | 80x500x10 |
| 07 | Ion cleaning source, ion beam opening, mm | 453 |