VTT 700 IM2
The VTT700 IM2 vertical linear vacuum coating system is designed for applying chromium coatings and its gas compounds to large and small optical glass rulers.
Sputtering is performed using a magnetron process with preliminary heating and ion beam cleaning. The maximum sputtered part size is 3650 x 400 mm.
Technical specifications.
| 01 | Chamber size, mm | 240x720x700 | 02 | Fore | Roots pump, pumping speed 500 m3/h. Rotary vane pump, pumping speed 648 m3/h. |
| 03 | High vacuum pump | Diffusion pump ND 400R | 04 | Vacuum control | INFICON vacuum sensors |
| 05 | Rotation drive | Upper | 06 | Magnetron sputtering source, target, mm | 80x570x10 |
| 07 | Ion cleaning source, ion beam opening, mm | 448 |