VTT 900 DIM4

The VTT 900 DIM4 is designed for applying hardening coatings to gas turbine blades using magnetron and electric arc sputtering using conductive refractory materials (Ti, Mo, Zr, etc.).

A distinctive feature of this : – the presence of two doors, which significantly speeds up the loading of the sprayed parts and facilitates the cleaning of the chamber and maintenance of the process sources; – the ability to install nine process sources and move them around the chamber.

Technical specifications.

01 Chamber size, mm Ø900х1400 02 Fore Roots pump with a pumping speed of 550 m³/h Rotary vane pump with a pumping speed of 90 m³/h
03 High vacuum pump Diffusion pump ND 630E 04 Vacuum control INFICON vacuum sensors
05 Rotational drive Upper 06 Magnetron sputtering source, target, mm 80x1100 x10
07 Extended arc evaporation source, cathode, mm 80x1100x25 08 Ion cleaning source, ion beam opening, mm 1000