VTT 600 M2I
The VTT-600 M2I vacuum coating system is designed for applying high-quality functional and protective coatings to ceramic and ferrite components. The system combines advanced magnetron evaporation, ion cleaning, and thermal substrate heating technologies. Thanks to its sophisticated modular architecture and stainless steel protective screens, the system ensures maximum process cleanliness, excellent layer adhesion, and flawless batch-to-batch repeatability.
The automation system takes production management to a new level. The complex is equipped with an intelligent control system based on an industrial computer and specialized proprietary software (the ConVac software suite). It integrates vacuum pumping, actuators, gas supply systems, and monitoring sensors into a single system. The equipment supports both a flexible manual mode for testing new technologies and a semi-automated mode for serial production, minimizing the impact of human error.
VTT 600 M2I Review
Technical specifications.
| 01 | Dimensions of the chamber (loading module), mm | 600х120х570 | 02 | Dimensions of the chamber (sputtering module), mm | 600х120х1090 |
| 03 | Forevacuum unit | Roots pump, pumping rate 280 m³/h Rotary vane pump, pumping rate 90 m³/h | 04 | High vacuum pump | Diffusion pump ND 400R |
| 05 | Vacuum control | INFICON vacuum sensors | 06 | Transport system | Driven conveyor (rollers with vacuum inputs, asynchronous motor with frequency drive) for moving trolleys between chambers using optical sensors |
| 07 | Heating system | Upper heater for heating products up to 200°C with thermocouple control via a vacuum input and automatic control via a feedback loop | 08 | Magnetron sputtering source, target, mm | 80х592х10 |
| 09 | Ion cleaning source, dimensions, mm | 110х598х54 |